2012			week
class		date &	#	Reading	topics	HW	lab/ field trip	Enrichment
1	Thursday	Jan. 5	1	chpt.2 & 1 (15 pages)	Kin. Theory of Gas & MS #1			pumps, gauges
2	Tuesday	Jan. 10		& LH manual	Vacuum & MS #2	1		Cryo & diff. pumps
3	Thursday	Jan. 12	2	Chp. 1 & 2	Material Science #3 & Vac.	2
4	Tuesday	Jan. 17				3		mass spectrometers
5	Thursday	20-Jan	3	Chp. 3	Evaporation Process	4	Evaporators, U238	Quartz thickness monitor
6	Tuesday	24-Jan						Valves & UHV components
7	Thursday	26-Jan	4	10.1-.2		5	Ellipsometer, Dectak
8	Tuesday	31-Jan		Chp. 4	Plasmas!		EE :PECVD & Ashers	Gas line hardware
9	Thursday	2-Feb	5			6	U234	flow controllers
10	Tuesday	7-Feb		Review	Exam 1: 1-4	7		capacitance monometers
11	Thursday	9-Feb	6	Ch. 5	plasma & ion beam		EE clean room	Targets & sources
12	Tuesday	14-Feb			processing	8	U234	POWER supplies, ion guns
13	Thursday	16-Feb	7	6	CVD	9	EE	Gases: sources, purifiers & safety
	Tuesday	21-Feb			Holiday
14	Thursday	23-Feb						Mass Flow Control & Quartzware
15	Tuesday	28-Feb	8			10
16	Thursday	1-Mar		7	Surfaces & nucleation		TEM (10.3.3)	Substrates
17	Tuesday	6-Mar	9				AFM (10.3.5)	Auger (AES) (10.4.4)
18	Thursday	8-Mar		8	Epitaxy	11	Hedco	MBE, LEED
19	Tuesday	13-Mar	10				XRD. TEM	RHEED
20	Thursday	15-Mar		9	Film structure	12	SEM(10.3.2): UGL& Cluff	AFM
21	Tuesday	20-Mar	11			13	TechSem Lab?	EBSD (~Kikuchi) lines
22	Thursday	22-Mar		Review	Exam 2: 5-8 or 9	14
23	Tuesday	27-Mar	12	10. 3-4			XRD (10.3.4) TEM
24	Thursday	29-Mar			Characterization	15	XPS, SIMS  (10.4.5& .8)	Your Mystry wafers
25	Tuesday	3-Apr	13	11	Interdiffusion, reactions
26	Thursday	5-Apr			& transformations	16
27	Tuesday	10-Apr	14	12	Mechanical properties	17	where?	Wafer bowing?
28	Thursday	12-Apr		Review	&  Presentations	18 & 9
	Tuesday	17-Apr		700-1000	Final