| Abstract: |
We developed and are calibrating an Extreme Ultraviolet (EUV) transmission grating spectrometer for absolute intensity measurements over an extremely wide spectral range. Spectra from ablated Li, Fe, Sn, and W solid targets have been recorded and analyzed. We have acquired spectral resolution of 0.2 nm from wavelengths of 2 to 85 nm, with an overall spectral range of 2 to 250 nm. The device is very compact (60 x 200 mm) and ideal for absolute intensity measurements at 13.5 nm as well as for characterizing EUV lithography plasma sources. The CCD camera detector can be absolutely calibrated to equate the intensity recorded to electron energy and plasma temperature. |